旋涂法制备功能薄膜的研究进展

doi:10.7517/j.issn.1674-0475.2012.02.91

影像科学与光化学 ›› 2012, Vol. 30 ›› Issue (2): 91-101.DOI: 10.7517/j.issn.1674-0475.2012.02.91

旋涂法制备功能薄膜的研究进展

王东^1,2, 刘红缨¹, 贺军辉², 刘林林¹

1. 中国矿业大学(北京) 化学工程与环境学院, 北京 100083;
2. 中国科学院理化技术研究所功能纳米材料实验室, 北京 100190

收稿日期:2011-11-07 修回日期:2011-12-06 出版日期:2012-03-15 发布日期:2012-03-15
通讯作者: 贺军辉,研究员,博士生导师,E-mail:jhhe@mail.ipc.ac.cn,Tel:010-82543535.
基金资助:
中国科学院重要方向性项目(KGCX-YW-370);中国科学院光化学转换与功能材料重点实验室开放基金.

Progress in Preparation of Functional Films by Spin-Coating

WANG Dong^1,2, LIU Hong-ying¹, HE Jun-hui², LIU Lin-lin¹

1. School of Chemical and Environmental Engineering, China University of Mining and Technology, Beijing 100083, P.R.China;
2. Functional Nanomaterials Laboratory, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, P.R.China

Received:2011-11-07 Revised:2011-12-06 Online:2012-03-15 Published:2012-03-15

摘要/Abstract

摘要： 作为众多的薄膜制备方法之一,旋涂法具备薄膜厚度精确可控、高性价比、节能、低污染等优势,在微电子技术、纳米光子学、生物学、医学等领域中有着广阔的应用前景.本文简单介绍了旋涂法的模型、机理及其主要参数的估算方法,并总结了近几年来用旋涂法制备光学、微电子学等功能薄膜的新进展,最后对旋涂法的发展前景进行了展望.

关键词: 旋涂法, 功能薄膜, 厚度控制

Abstract: Spin-coating, as one of thin film preparation methods, has advantages of precise thickness control, high cost performance, energy saving, low pollution, etc. Thin films fabricated by spin-coating are widely applied in the areas of microelectronics, nanophotonics, biology, medicine, etc. In this paper, fundamental processes and estimation methodologies of key parameters for spin-coating are briefly introduced. Then a range of advanced applications and recent progresses of spin-coating technology within several disciplines are reviewed, including optics, microelectronics, etc. Finally, the developing trend of spin-coating technology is also discussed.

Key words: spin-coating, functional films, thickness control

中图分类号:

王东, 刘红缨, 贺军辉, 刘林林. 旋涂法制备功能薄膜的研究进展[J]. 影像科学与光化学, 2012, 30(2): 91-101.

WANG Dong, LIU Hong-ying, HE Jun-hui, LIU Lin-lin. Progress in Preparation of Functional Films by Spin-Coating[J]. Imaging Science and Photochemistry, 2012, 30(2): 91-101.

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旋涂法制备功能薄膜的研究进展

Progress in Preparation of Functional Films by Spin-Coating

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