双光子微纳加工技术结合化学镀工艺制备三维金属微弹簧结构

doi:10.7517/j.issn.1674-0475.2014.06.542

影像科学与光化学 ›› 2014, Vol. 32 ›› Issue (6): 542-549.DOI: 10.7517/j.issn.1674-0475.2014.06.542

双光子微纳加工技术结合化学镀工艺制备三维金属微弹簧结构

贾雁鹏^1,3, 郑美玲¹, 董贤子¹, 赵震声¹, 段宣明^1,2

1. 中国科学院理化技术研究所, 北京 100190;
2. 中国科学院重庆绿色智能技术研究院, 重庆 400714;
3. 中国科学院大学, 北京 100049

收稿日期:2014-04-21 修回日期:2014-05-15 出版日期:2014-11-15 发布日期:2014-11-15
通讯作者: 段宣明
基金资助:
国家重点基础研究发展规划973项目(2010CB934103)、国家自然科学基金项目(91123032, 61205194, 61275048,61275171)和中国科学院与日本学术振兴会共同研究项目(GJHZ1411) 资助

3D Metallic Micro-spring Fabrication Based on Two-photon Micro/Nano Fabrication Method and Electroless Plating Technique

JIA Yanpeng^1,3, ZHENG Meiling¹, DONG Xianzi¹, ZHAO Zhensheng¹, DUAN Xuanming^1,2

1. Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, P.R.China;
2. Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Science, Chongqing 400714, P.R.China;
3. University of Chinese Academy of Sciences, Beijing 100049, P.R.China

Received:2014-04-21 Revised:2014-05-15 Online:2014-11-15 Published:2014-11-15

摘要/Abstract

摘要：

利用飞秒激光双光子微纳加工技术与化学镀工艺制备了三维金属微弹簧结构.采用扫描电子显微镜(SEM)及选区电子能谱(EDS)对镀层进行了表征,当化学镀时间为15 min时,所得到的镀层厚度约为130 nm.对不同电镀时间下获得的镀层电阻率进行了测定,实验结果表明,当电镀时间为35 min时得到的镀层电阻率约为80×10^-9 Ω·m,仅为银块体材料电阻率16×10^-9 Ω·m的5倍.利用这种方法,我们制备了总长度为28.75 μm、周期为2.93 μm的悬空金属弹簧结构,其中弹簧圈数为9圈,直径为6 μm,弹簧线分辨率为1.17 μm.文中所述的将双光子微纳加工技术与化学镀技术相结合的方法可以实现任意三维微金属结构与器件的制备,在微光学器件、微机电系统(MEMS)及微传感器等领域有着广泛的应用前景.

关键词: 双光子微纳加工技术, 化学镀, 三维金属微纳米结构

Abstract:

In this paper, we fabricate a 3D metallic micro-spring based on two-photon fabrication method and electroless plating technique. Scanning electron microscope (SEM) and selected area energy dispersive spectroscopy (EDS) are used to characterize the electroless plated silver layers at different electroless plating time. When the plating time is 15 min, the thickness of the layer is about 130 nm. The electric resistivity of the plated layer is 80×10^-9 Ω·m at the plating time of 35 min, which is only 5 times of the block silver resistivity. The method used in this paper can be employed to fabricate any 3D metallic micro structures and devices, which could have extensive applications in areas of micro optical devices, micro-electro and mechanical systems(MEMS) and micro sensors fabrication.

Key words: two-photon polymerization, electroless plating technique, three dimensional metallic micro structures

贾雁鹏, 郑美玲, 董贤子, 赵震声, 段宣明. 双光子微纳加工技术结合化学镀工艺制备三维金属微弹簧结构[J]. 影像科学与光化学, 2014, 32(6): 542-549.

JIA Yanpeng, ZHENG Meiling, DONG Xianzi, ZHAO Zhensheng, DUAN Xuanming. 3D Metallic Micro-spring Fabrication Based on Two-photon Micro/Nano Fabrication Method and Electroless Plating Technique[J]. Imaging Science and Photochemistry, 2014, 32(6): 542-549.

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双光子微纳加工技术结合化学镀工艺制备三维金属微弹簧结构

3D Metallic Micro-spring Fabrication Based on Two-photon Micro/Nano Fabrication Method and Electroless Plating Technique

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