影像科学与光化学 ›› 2017, Vol. 35 ›› Issue (4): 413-428.DOI: 10.7517/j.issn.1674-0475.2017.04.006

• 综述 • 上一篇    下一篇

双光子光聚合与功能微纳结构制备

郑美玲1, 金峰1, 董贤子1, 赵圆圆2, 赵震声1, 段宣明2   

  1. 1. 中国科学院 理化技术研究所, 北京 100190;
    2. 中国科学院 重庆绿色智能技术研究院, 重庆 400714
  • 收稿日期:2017-05-31 修回日期:2017-06-09 出版日期:2017-07-15 发布日期:2017-07-15
  • 通讯作者: 郑美玲
  • 基金资助:

    国家自然科学基金项目(91323301,91123032,61475164)、国家重点基础研究发展规划973项目(2010CB934103)和国家重点研发计划项目(2016YFA0200501,2016YFC1100502)

Two-photon Photopolymerization and Functional Micro/nanostructure Fabrication

ZHENG Meiling1, JIN Feng1, DONG Xianzi1, ZHAO Yuanyuan2, ZHAO Zhensheng1, DUAN Xuanming2   

  1. 1. Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, P. R. China;
    2. Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, P. R. China
  • Received:2017-05-31 Revised:2017-06-09 Online:2017-07-15 Published:2017-07-15

摘要:

随着纳米光电子学及生物医学组织工程领域的发展,器件的小型化、结构多样化及高度集成化,给微纳结构与器件制造领域带来了新的挑战。本文围绕飞秒激光双光子聚合技术,简要综述了双光子光聚合基本原理与双光子引发剂分子的研究进展,并对飞秒激光双光子聚合技术在功能微纳结构与器件制备中的应用及发展前景进行了展望。

关键词: 飞秒激光, 双光子光聚合, 引发剂, 功能微纳结构

Abstract:

Accompanying the development of nanophotonics, nanoelectronics and biomedical tissue engineering, the miniature of the device, the structure variety and the highly integration make new challenges to micro/nanostructure and device manufacturing. In this paper, the two-photon polymerization technique, the principle of two-photon polymerization, the research progress of two-photon photoinitiator, and the application of fabricating functional micro/nanostructure and device by two-photon polymerization technique have been reviewed and discussed.

Key words: femtosecond laser, two-photon polymerization, photoinitiator, functional micro/nanostructure