Progress in Preparation of Functional Films by Spin-Coating

doi:10.7517/j.issn.1674-0475.2012.02.91

Abstract

Abstract: Spin-coating, as one of thin film preparation methods, has advantages of precise thickness control, high cost performance, energy saving, low pollution, etc. Thin films fabricated by spin-coating are widely applied in the areas of microelectronics, nanophotonics, biology, medicine, etc. In this paper, fundamental processes and estimation methodologies of key parameters for spin-coating are briefly introduced. Then a range of advanced applications and recent progresses of spin-coating technology within several disciplines are reviewed, including optics, microelectronics, etc. Finally, the developing trend of spin-coating technology is also discussed.

Key words: spin-coating, functional films, thickness control

CLC Number:

WANG Dong, LIU Hong-ying, HE Jun-hui, LIU Lin-lin. Progress in Preparation of Functional Films by Spin-Coating[J]. Imaging Science and Photochemistry, 2012, 30(2): 91-101.

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