The Preparation and Properties of 1-Substituted cis-1,2-Cyclohexanediol Monosulfonate Acid Amplifier

doi:10.7517/j.issn.1674-0475.2005.05.389

Abstract

Abstract: Two 1-substituted cis-1,2-cyclohexanediol monosulfonate acid amplifiers were prepared by hydrogen peroxide oxidizing of corresponding olefin and then esterified with p-toluenesulfonyl chloride. The acidolysis properties were studied directly by detecting the small amounts of acid generated by the compounds with our method using bromophenol as indicator. The two compounds displayed good acidolysis property when moderately warmed but the storage stability is low. They are also unstable to polar solvents.

Key words: acid amplifier, photoresists, sulfonate, PAG

CLC Number:

SHENG Li-ying, ZHANG Song-pei, WANG Li-yuan. The Preparation and Properties of 1-Substituted cis-1,2-Cyclohexanediol Monosulfonate Acid Amplifier[J]. Imaging Science and Photochemistry, 2005, 23(5): 389-393.

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The Preparation and Properties of 1-Substituted cis-1,2-Cyclohexanediol Monosulfonate Acid Amplifier

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