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中文
Research Progress of the Bottom Anti-reflective Coating for Photoresist
WANG Kuan, LIU Jingcheng, LIU Ren, MU Qidao, ZHENG Xiangfei, JI Changwei, LIU Xiaoya
Imaging Science and Photochemistry . 2016, (
2
): 123 -135 . DOI: 10.7517/j.issn.1674-0475.2016.02.123