Table of Content

15 January 2012, Volume 30 Issue 1

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Review

Lithography: Its Path of Evolution and Future Trends

Yoshikazu Yamaguchi, Akimasa Soyano, Motoyuki Shima

2012, 30(1):  1-8.  DOI: 10.7517/j.issn.1674-0475.2012.01.1

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Optical lithography plays an important role within high volume manufacturing (HVM) of semiconductor devices. Most “State of the art” Fabs have implemented ArF immersion technology today. Double patterning, double exposure, and side-wall image transfer technology allow for the extension of ArF immersion into 32 nm half-pitch (HP) application. In order to fabricate finer patterns, it is necessary to develop new processes. EUV lithography is a leading next generation solution for 22 nm HP and beyond. In addition, alternative solutions such as nano-imprint lithography and mask-less technology are also being considered for advanced nodes, however, they are only in the development stage at this time and in their current state represent a lot of challenges for HVM. In this paper, an overview of lithography is described from the aspect of “Materials”. Additionally, future trends in lithography will be discussed.

Recent Progress of Tetraphenylethenes with Aggregation-Induced Emission

XIA Jing, WU Yan-mei, ZHANG Ya-ling, TONG Bing, SHI Jian-bing, ZHI Jun-ge, DONG Yu-ping

2012, 30(1):  9-25.  DOI: 10.7517/j.issn.1674-0475.2012.01.9

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Among the novel organic molecules with aggregation-induced emission (AIE), tetraphenylethenes (TPEs) enjoy the advantages of facile synthesis and efficient solid-state emission as well as high thermal stability. This review mainly focuses on the AIE properties of TPEs with the aspect of hydrophilicity or hydrophobicity.The relationship between TPEs' structures and AIE properties was explained. The application as bio- and chemo-sensors was introduced. Finally, a brief outlook on the design of new AIE-active TPEs and the application of them in relevant fields is forwarded.

Research articles

Research on the Holographic Recording Characteristics and Applications of a Panchromatic Photopolymer

WEI Ming-bin, LI Ze-ren, XIE Bang, WANG Gui-xi, ZHU Jian-hua

2012, 30(1):  26-32.  DOI: 10.7517/j.issn.1674-0475.2012.01.26

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By selecting Methylene blue, Eosin Y and Acridine Orange as red-, green- and blue-sensitive photosensitizers respectively, a water-soluble panchromatic photopolymer is fabricated successfully. This material has high diffraction efficiency (over 90%) and high photosensitivity (~70 mJ/cm²) for three primary color lasers. Angular and wavelength multiplexing holograms are successfully recorded in the same location of the panchromatic photopolymer, the reconstructed multicolor images are clear and bright, and there is no obvious crosstalk between them. The experimental results show that this panchromatic photopolymer material has good holographic recording characteristics and application prospects.

Mixed Solvothermal Synthesis and Characterization of BaFBr:Eu²⁺ Nano/Micro-Crystals

LIANG Qing-hua, SHI Yao, MA Wang-jing, YANG Xin-min, LI Zhi

2012, 30(1):  33-42.  DOI: 10.7517/j.issn.1674-0475.2012.01.33

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Uniform BaFBr:Eu²⁺ nano/micro-crystals with different morphology and size were prepared by solvothermal method in the ethanol-water mixed solvents. A possible formation process of the products was proposed on the basis of phase and morphology results under different reaction conditions. The phase structure, morphology and optical properties of the products were characterized by X-ray diffraction (XRD), field-emission scanning electron microscopy (FESEM), transmission electron microscopy (TEM), high-resolution TEM (HRTEM) and photoluminescence (PL). Preliminary results reveal that the phase, size and morphology of the products strongly depend on the reaction time, temperature and surfactant amounts. Annealing at 300 ℃ under reducing atmosphere and excited at 280 nm UV-light, the BaFBr:Eu²⁺ samples show sharp emission at 390 nm due to the transitions of 4f⁶5d¹ → 4f⁷of Eu²⁺, which suggests the as-prepared BaFBr:Eu²⁺ is a promising X-ray storage phosphor in imaging plates for computed radiography.

Research notes

Coumarin Derivatives of Anion Recognition Characteristics

WU Ying, ZHANG Sheng-ci, MA Hong-kun

2012, 30(1):  43-52.  DOI: 10.7517/j.issn.1674-0475.2012.01.43

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Used ultraviolet spectrum titration method to study the three Coumarin derivatives and anionic special recognition behavior, compared the receptors of anion molecular structure, and the influence of anion concentrations on the coordination compounds absorption spectrum. We used the UV-Vis method to study the recognition of the receptors to the different kinds of anion(such as F^-、Cl^-、Br^-、Ac^-、H₂PO₄^-、HSO₄^- ), some of receptors can bind well with anion through hydrogen bond because of the good orientation and the selectivity of the hydrogen bond, so it has good selectivity and recognition to the some anion(such as F^-、Ac^-、H₂PO₄^-), and with almost no effect on the other anions.

The Photographic Performances Research of Photothermographic Materials Based on Mixed Silver Salts

LI Qiu-yan, SUN Shuang-yue, LIANG Hai-yan, LI Jin-pei

2012, 30(1):  53-59.  DOI: 10.7517/j.issn.1674-0475.2012.01.53

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The photographic performances of photothermographic (PTG) materials based on silver benzotriazole (AgBTA) and silver 4-hydroxy-6-methyl-1,3,3a,7-tetraazaindene (AgTAI) have been studied, in which, hydrophilic polyvinyl alcohol (PVA) is used as a binder and the AgBrI prepared by in-situ method as photo-sensitive element. It is found that the mixed silver source PTG materials have a higher sensitivity than the PTG materials based on single AgBTA. The mechanism of the mixed silver source PTG materials with a higher sensitivity has been investigated according to the measurements of pH, pAg of the emulsion and the differential scanning calorimetry (DSC) of the mixed silver salts. It is analyzed that the elevation of the sensitivity is due to the fine grains of mixed silver salts and high concentration of silver ions so that promote the development process.

Preparation and Photocatalytic Properties of Eu-Doped TiO₂ under Visible Light Irradiation

ZHENG Yun, GU Yan, WANG Shu-lian, YANG Jing, LAN Tian-long, HUANG Ying-ping, ZHANG Ai-qing

2012, 30(1):  60-70.  DOI: 10.7517/j.issn.1674-0475.2012.01.60

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Eu-doped TiO₂ nano-particles had been prepared by sol-gel method and characterized by transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and UV-visible diffuse reflectance spectra (UV-Vis DRS). The results showed that the band gap of Eu-TiO₂ was narrower than that of TiO₂. Eu-TiO₂ had photocatalytic activity. The effect of preparation conditions of orgaric compounds on the degradation of rhodamine B(RhB) was studied. The optimal conditions were pH 3, n_Eu/n_Ti=0.05% and calcination temperature 500 ℃. The degradation of rhodamine B (RhB) and salicylic acid (SA) under visible light irradiation were used as testing reactions to analyze the activity of Eu-TiO₂ with different loadings. The results showed that RhB and SA were effectively degraded and mineralized, and the degradation reaction was predominated by the hydroxyl radical (·OH).

Application and development

Study on Super-Hydrophilic of TiO₂ and Erasable Printing Plates

YU Ming-guang, CHEN Guang-xue, CHEN Qi-feng, HUANG Wen-tao, QU Zhen-cai, ZHU Zhi-wei

2012, 30(1):  71-77.  DOI: 10.7517/j.issn.1674-0475.2012.01.71

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Based on using sol -gel to prepare SiO₂ and TiO₂ films and coating on the glass substrate, this paper studied on TiO₂ thin film under UV irradiation and its super-hydrophilic properties changing with the light of time, analyzed the SiO₂ film on the cover TiO₂ film on its friction properties. The results showed that: hydrophobicity of TiO₂ thin films by ultraviolet irradiation drastically reduced, showed super hydrophilic properties and water contact angle could reach 5? below; when the films was coated on the glass slide, they showed the good rubbing and weather resistance. These results show that: the super hydrophilicity of TiO₂ is expected as a new type of environmentally friendly reusable printing plate.