Research on the Synthesis and Properties of a Matrix Resin to be Used for 248 nm Photoresist
LIU Jian-guo, JIANG Ming, ZENG Xiao-yan
Imaging Science and Photochemistry . 2013, (5): 349 -360 .  DOI: 10.7517/j.issn.1674-0475.2013.05.349

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