Progress of the Study on Nanoimprint Resists
HUO Yong-en, JIA Yue, WANG Li-yuan
Imaging Science and Photochemistry . 2008, (2): 148 -156 .  DOI: 10.7517/j.issn.1674-0475.2008.02.148

京ICP备05002791-6号
Copyright © IMAGING SCIENCE AND PHOTOCHEMISTRY, All Rights Reserved.
Tel: 010-82543683　E-mail: xb@mail.ipc.ac.cn
Powered by Beijing Magtech Co., Ltd.