基于低相干干涉的透镜厚度测量及生物影像研究进展

doi:10.7517/j.issn.1674-0475.2016.01.005

影像科学与光化学 ›› 2016, Vol. 34 ›› Issue (1): 5-14.DOI: 10.7517/j.issn.1674-0475.2016.01.005

基于低相干干涉的透镜厚度测量及生物影像研究进展

檀泽浩^1,2, 冯云鹏^1,2, 王钟³

1. 北京理工大学光电学院光机电联合研究中心, 北京 100081;
2. 北京理工大学深圳研究院, 广东深圳 518057;
3. 深圳市博瑞汇达科技有限公司, 广东深圳 518057

收稿日期:2015-10-23 修回日期:2015-11-10 出版日期:2016-01-15 发布日期:2016-01-15
通讯作者: 冯云鹏
基金资助:
国家自然科学基金项目(61308075)和北京市自然科学基金项目(2132047,4144083)资助

Advances in Measurement of Optical Central Thickness by Low Coherence Interferometry

TAN Zehao^1,2, FENG Yunpeng^1,2, WANG Zhong³

1. Joint Research Center for Optomechatronics Engineering, School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, P. R. China;
2. Shenzhen Research Institute, Beijing Institute of Technology, Shenzhen 518057, Guangdong, P. R. China;
3. Boruihuida Science and Technology Ltd. Co., Shenzhen 518057, Guangdong, P. R. China

Received:2015-10-23 Revised:2015-11-10 Online:2016-01-15 Published:2016-01-15

摘要/Abstract

摘要：

低相干光干涉测量技术作为重要的非接触测量方法之一,由于具有结构简单、测量速度快及分辨率高的优点,在光学系统的非接触测量及生物医学影像等前沿领域具有广阔的应用前景。本文对透镜组的光学元件中心厚度及空气间隔的非接触测量技术进行了总结,简述了基于OCT的生物医学影像方面研究现状,重点论述基于低相干光干涉法测量原理和研究进展,对比分析相关研究方法的优缺点和创新之处,并从系统结构和应用范围的角度对低相干干涉测量技术的发展趋势作了展望。

关键词: 非接触测量, 低相干干涉, 光学层析成像, 透镜厚度, 生物医学影像

Abstract:

With the advantages of high accuracy and fast speed,low coherence interferometry has broad prospects on non-contact measurement of optical system and biomedical imaging. By overviewing the important advances in simultaneous measurement of central thickness in lens system and describing the research status on biomedical imaging with OCT,we compare multiple research methods of low coherence interferometry by analyzing their innovation and finally prospect its development trend on new fields and improvements.

Key words: non-contact measurement, low coherence interferometry, OCT, lens thickness, biomedical imaging

檀泽浩, 冯云鹏, 王钟. 基于低相干干涉的透镜厚度测量及生物影像研究进展[J]. 影像科学与光化学, 2016, 34(1): 5-14.

TAN Zehao, FENG Yunpeng, WANG Zhong. Advances in Measurement of Optical Central Thickness by Low Coherence Interferometry[J]. Imaging Science and Photochemistry, 2016, 34(1): 5-14.

参考文献

[1] Youngquist R C,Carr S,Davies D E N. Optical coherence-domain reflectometry-a new optical evaluation technique[J]. Optics Letters,1987,12(3):158-160.
[2] Fercher A F,Mengedoht K,Werner W. Eye-length measurement by interferometry with partially coherent light[J]. Optics Letters,1988,13(3):186-188.
[3] Fujimoto J G,Desilvestri S,Ippen E P,Puliafito C A,Margolis R,Oseroff A. Femtosecond optical ranging in biological-systems[J]. Optics Letters,1986,11(3):150-150.
[4] Huang D,Swanson E A,Lin C P,Schuman J S,Stinson W G,Chang W,Hee M R,Flotte T,Gregory K,Puliafito C A,Fujimoto J G. Optical coherence tomography[J]. Science,1991,254(5053): 1178-1181.
[5] 苑立波. 光纤白光干涉技术的回顾与展望[J]. 光学学报,2011,31(9):314-326.Yuan L B. Overview and forecast of fiber optic white-light interfreometry[J]. Acta Optica Sinica,2011,31(9):314-326.
[6] Haruna M,Ohmi M,Mitsuyama T,Tajiri H,Maruyama H,Hashimoto M. Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry[J]. Optics Letters, 1998,23(12):966-968.
[7] Ohmi M,Shiraishi T,Tajiri H,Haruna M. Simultaneous measurement of refractive index and thickness of transparent plates by low coherence interferometry[J]. Optical Review, 1997,4:507-515.
[8] Maruyama H,Mitsuyama T,Ohmi M,Haruna M. Simultaneous measurement of refractive index and thickness by low coherence interferometry considering chromatic dispersion of index[J]. Optical Review,2000,7(5): 468-472.
[9] Maruyama H,Inoue S,Mitsuyama T,Ohmi M,Haruna M. Low-coherence interferometer system for the simultaneous measurement of refractive index and thickness[J]. Applied Optics,2002,41(7): 1315-1322.
[10] Choi E S,Na J,Lee B H. Fiber-based high-resolution OCT system with halogen light source[J]. Proceedings of SPIE,2004,454-462.
[11] Kim S,Na J,Kim M J,Lee B H. Simultaneous measurement of refractive index and thickness by combining low-coherence interferometry and confocal optics[J]. Optics Express,2008,16(8): 5516-5526.
[12] Wilhelm R,Courteville A,Garcia F. Dimensional metrology for the fabrication of imaging optics using a high accuracy low coherence interferometer[C]. Proceedings of the Conference on Optical Measurement Systems for Industrial Inspection IV. Germany:Munich,2005,469-480.
[13] Courteville A,Wilhelm R,Garcia F. A novel low coherence fibre optic interferometer for position and thickness mea-surements with unattained accuracy[C]. Proceedings of the Conference on Speckles, From Grains to Flowers. France: Nimes,2006,63411Q-1-63411Q-6.
[14] Wilhelm R,Courteville A,Garcia F,De Vecchi F. On-axis non-contact measurement of glass thicknesses and airgaps in optical systems with submicron accuracy-art. No. 66163p[C]. Proceedings of the Conference on Optical Measurement Systems for Industrial Inspection V. GERMANY:Munich,2007.
[15] Langehanenberg P,Dumitrescu E,Heinisch J,Krey S,Ruprecht A K. Automated measurement of centering errors and relative surface distances for the optimized assembly of micro optics[C].Proceedings of the Conference on Micromachining and Microfabrication Process Technology XVI. San Francisco:CA,2011,7926(1):225-229.
[16] Langehanenberg P,Ruprecht A,Off D,Lueerss B. Highly accurate measurement of lens surface distances within optical assemblies for quality testing[C]. Optical System Alignment, Tolerancing, and Verification VII. 2013,88440F-1-88440F-8.
[17] Stickler D,Langehanenberg P,Luerss B,Heinisch J. Optomechanical characterization of large wafer stepper-optics with respect to centering errors,lens distances,and center thicknesses[C]. Proceedings of the Conference on Optical Microlithography XXVI. San Jose:CA,2013,86832C-1-86832C-8.
[18] Lueerss B,Langehanenberg P. Thickness and air gap mea-surement of assembled IR objectives[C]. Proceedings of the Conference on Dimensional Optical Metrology and Inspection for Practical Applications IV. Baltimore:MD,2015, 96480D1-96480D10.
[19] 王志斌,史国华,何益,丁志华,张雨东. 光学相干层析技术在光学表面间距测量中的应用[J]. 光学精密工程,2012,20(7):1469-1474. Wang Z B,Shi G H,He Y,Ding Z H,Zhang Y D. Application of optical coherence tomography to distance measurement of optical surface[J]. Optics and Precision Engineering,2012,20(7): 1469-1474.
[20] Watanabe K,Nomura T,Ieee. Refractive index & physical thickness distributions measurement and consideration of dependence of measurement accuracy on scanning interval using low-coherence digital holography[C].2013 IEEE/Sice International Symposium on System Integration (Sii),2013,586-591.
[21] Watanabe K,Ohshima M,Nomura T. Simultaneous measurement of refractive index and thickness distributions using low-coherence digital holography and vertical scanning[J]. Journal of Optics,2014,16(4):2218-2221.
[22] Zilio S C. Simultaneous thickness and group index mea-surement with a single arm low-coherence interferometer[J]. Optics Express,2014,22(22):27392-27397.
[23] Marcus M A,Hadcock K J,Gibson D S,Herbrand M E,Ignatovich F V. Precision interferometric measurements of refractive index of polymers in air and liquid[J]. Proceedings of SPIE,2013,8884:255-267.
[24] Verrier I,Veillas C,Lepine T. Low coherence interferometry for central thickness measurement of rigid and soft contact lenses[J]. Optics Express,2009,17(11):9157-9170.
[25] Lauri J,Czajkowski J,Myllyla R,Fabritius T. Measuring flow dynamics in a microfluidic chip using optical coherence tomography with 1μm axial resolution[J]. Flow Mea-surement and Instrumentation,2015,43(3):1-5.

基于低相干干涉的透镜厚度测量及生物影像研究进展

Advances in Measurement of Optical Central Thickness by Low Coherence Interferometry

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