两种耐高温紫外正型光刻胶成膜树脂的制备及性能
刘建国
Preparation and Properties of Two High-Thermostability Matrix Resins for UV Positive Photoresist
LIU Jian-guo
影像科学与光化学 . 2012, (5): 330 -337 .  DOI: 10.7517/j.issn.1674-0475.2012.05.330