含N-苯基马来酰亚胺甲基丙烯酸酯共聚物的合成及其在负性光致抗蚀剂中的应用
刘敬成, 郑祥飞, 林立成, 穆启道, 孙小侠, 刘晓亚
Synthesis of Methacrylate Copolymers Containing N-PMI and Their Application in Negative-type Photoresist
LIU Jingcheng, ZHENG Xiangfei, LIN Licheng, MU Qidao, SUN Xiaoxia, LIU Xiaoya
影像科学与光化学
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2015, (3): 230
-237
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DOI: 10.7517/j.issn.1674-0475.2015.03.230
