含碘鎓盐光产酸剂和增感染料的化学增幅型i-线正性光致抗蚀剂
刘娟, 孔繁荣, 余金星, 王力元
Chemically Amplified Positive i-Line Photoresist Containing Iodonium Salt PAG and Dye Sensitizers
LIU Juan, KONG Fan-rong, YU Jin-xing, WANG Li-yuan
影像科学与光化学
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2011, (6): 430
-437
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DOI: 10.7517/j.issn.1674-0475.2011.06.430
