Fabrication of Silicon Nanowires Resonators with Silicon Layer Doped by High Concentration Boron
LIU Yang, ZHANG Mingliang, JI An, WANG Xiaodong, YANG Fuhua
Imaging Science and Photochemistry . 2016, (3): 265 -272 .  DOI: 10.7517/j.issn.1674-0475.2016.03.265

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