Applications and Syntheses of Polyhydroxystyrene in Deep UV Photoresist
LIU Jian-guo, ZHENG Jia-shen, LI Ping
Imaging Science and Photochemistry . 2006, (1): 67 -74 .  DOI: 10.7517/j.issn.1674-0475.2006.01.67

京ICP备05002791-6号
Copyright © IMAGING SCIENCE AND PHOTOCHEMISTRY, All Rights Reserved.
Tel: 010-82543683　E-mail: xb@mail.ipc.ac.cn
Powered by Beijing Magtech Co., Ltd.