Applications and Syntheses of Polyhydroxystyrene in Deep UV Photoresist

doi:10.7517/j.issn.1674-0475.2006.01.67

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LIU Jian-guo, ZHENG Jia-shen, LI Ping. Applications and Syntheses of Polyhydroxystyrene in Deep UV Photoresist[J]. Imaging Science and Photochemistry, 2006, 24(1): 67-74.

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Applications and Syntheses of Polyhydroxystyrene in Deep UV Photoresist

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