双波长离轴数字全息成像技术研究

doi:10.7517/issn.1674-0475.210801

影像科学与光化学 ›› 2021, Vol. 39 ›› Issue (6): 790-797.DOI: 10.7517/issn.1674-0475.210801

双波长离轴数字全息成像技术研究

葛磊^1,2, 文永富^1,2, 程灏波^1,2

1. 北京理工大学光电学院, 北京 100081;
2. 北京理工大学深圳研究院, 广东深圳 518057

收稿日期:2021-08-02 出版日期:2021-11-15 发布日期:2021-11-11
通讯作者: 文永富

Study on Off-axis Dual-wavelength Holographic Imaging

GE Lei^1,2, WEN Yongfu^1,2, CHENG Haobo^1,2

1. School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, P. R. China;
2. Shenzhen Research Institute, Beijing Institute of Technology, Shenzhen 518057, Guangdong, P. R. China

Received:2021-08-02 Online:2021-11-15 Published:2021-11-11

摘要/Abstract

摘要： 针对单波长离轴全息显微成像系统存在的测量深度小以及相位解包裹算法存在相位模糊的问题，本文提出了一种反射式双波长离轴无透镜数字全息显微系统，该系统基于双波长离轴干涉技术，并利用二向色镜使两个不同波长参考光同时和物光进行离轴干涉形成全息图，最后采用双波长技术重建全息图得到合成波长的相位分布，从而实现单次采集两个离轴干涉图，达到拓展测量深度及避免相位解包裹运算时的相位模糊问题。本文首先从理论上数值模拟研究了双波长相位解包裹算法的有效性，最后，分别对磁流变抛光技术得到的光学表面抛光斑和标准光学分辨率板进行了双波长数字全息三维测量，实验初步验证了该系统的有效性和可行性。

关键词: 数字全息, 双波长, 相位解包裹, 三维测量

Abstract: Digital holographic microscopy (DHM) is a commonly used technique to obtain quantitative information by measuring the phase shifts in light and changes in the refractive index of the sample. In view of the small measurement depth of the single-wavelength holographic microscopic imaging system and the phase ambiguity of the phase unwrapping algorithm, a reflective mode dual-wavelength digital holographic microscopy utilizing dichroic mirror for quantitative phase imaging of 3D structures with extended thickness range is presented, which is based on dual-wavelength off-axis interference technology. This is done by simultaneous acquisition of two off-axis interferograms, each at a different wavelength, and generation of a synthetic wavelength, allowing for an extension of the measurement range. This method is explored by numerical simulation, and then a dual-wavelength digital holographic experimental setup is constructed for imaging the polishing spots obtained by magnetorheological polishing technology and USAF target. In conclusion, the effectiveness and feasibility of the system are preliminarily verified.

Key words: digital holography, dual wavelength, phase unwrapping, 3D measurement

葛磊, 文永富, 程灏波. 双波长离轴数字全息成像技术研究[J]. 影像科学与光化学, 2021, 39(6): 790-797.

GE Lei, WEN Yongfu, CHENG Haobo. Study on Off-axis Dual-wavelength Holographic Imaging[J]. IMAGING SCIENCE AND PHOTOCHEMISTRY, 2021, 39(6): 790-797.

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双波长离轴数字全息成像技术研究

Study on Off-axis Dual-wavelength Holographic Imaging

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