双光子微纳加工技术结合化学镀工艺制备三维金属微弹簧结构
贾雁鹏, 郑美玲, 董贤子, 赵震声, 段宣明
3D Metallic Micro-spring Fabrication Based on Two-photon Micro/Nano Fabrication Method and Electroless Plating Technique
JIA Yanpeng, ZHENG Meiling, DONG Xianzi, ZHAO Zhensheng, DUAN Xuanming
影像科学与光化学
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2014, (6): 542
-549
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DOI: 10.7517/j.issn.1674-0475.2014.06.542
