共价键合光致产酸剂的单分子树脂光刻胶:合成及光刻性能
张卫杰, 陈金平, 于天君, 曾毅, 李嫕
Synthesis and Lithographic Performance of Molecular Glass Photoresists with Covalently Bonded Photo-acid Generator
ZHANG Weijie, CHEN Jinping, YU Tianjun, ZENG Yi, LI Yi
影像科学与光化学
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2022, (2): 211
-219
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DOI: 10.7517/issn.1674-0475.211001
