一种自交联聚合物的合成及其在水显影化学增幅型负性抗蚀剂中的应用
陈其道, 陈明, 林天舒, 洪啸吟, 黄志齐, 胡德甫
SYNTHESIS OF A SELF-CROSSLINKING POLYMER AND ITS APPLICATION IN WATER-DEVELOPABLE,CHEMICALLY AMPLIFIED NEGATIVE PHOTORESIST
CHEN Qi-dao, CHEN Ming, LIN Tian-shu, HONG Xiao-yin, HUANG Zhi-qi, HU De-fu
影像科学与光化学
.
2000, (2): 155
-159
.
DOI: 10.7517/j.issn.1674-0475.2000.02.155
