3D Metallic Micro-spring Fabrication Based on Two-photon Micro/Nano Fabrication Method and Electroless Plating Technique

doi:10.7517/j.issn.1674-0475.2014.06.542

Abstract

Abstract:

In this paper, we fabricate a 3D metallic micro-spring based on two-photon fabrication method and electroless plating technique. Scanning electron microscope (SEM) and selected area energy dispersive spectroscopy (EDS) are used to characterize the electroless plated silver layers at different electroless plating time. When the plating time is 15 min, the thickness of the layer is about 130 nm. The electric resistivity of the plated layer is 80×10^-9 Ω·m at the plating time of 35 min, which is only 5 times of the block silver resistivity. The method used in this paper can be employed to fabricate any 3D metallic micro structures and devices, which could have extensive applications in areas of micro optical devices, micro-electro and mechanical systems(MEMS) and micro sensors fabrication.

Key words: two-photon polymerization, electroless plating technique, three dimensional metallic micro structures

JIA Yanpeng, ZHENG Meiling, DONG Xianzi, ZHAO Zhensheng, DUAN Xuanming. 3D Metallic Micro-spring Fabrication Based on Two-photon Micro/Nano Fabrication Method and Electroless Plating Technique[J]. Imaging Science and Photochemistry, 2014, 32(6): 542-549.

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