紫外光照射对掺铝氧化锌薄膜导电和透光性质的影响

doi:10.7517/j.issn.1674-0475.2010.02.95

影像科学与光化学 ›› 2010, Vol. 28 ›› Issue (2): 95-103.DOI: 10.7517/j.issn.1674-0475.2010.02.95

紫外光照射对掺铝氧化锌薄膜导电和透光性质的影响

张天宝^1,2, 李金培¹

1. 中国科学院, 理化技术研究所, 北京, 100190;
2. 中国科学院, 研究生院, 北京, 100039

收稿日期:2009-11-01 修回日期:2010-01-05 出版日期:2010-03-23 发布日期:2010-03-23

Effects of UV Light Irradiation on Conductive and Transmittance Properties of AZO Films

ZHANG Tian-bao^1,2, LI Jin-pei¹

1. Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, P. R. China;
2. Graduate School of Chinese Academy of Sciences, Beijing 100039, P. R. China

Received:2009-11-01 Revised:2010-01-05 Online:2010-03-23 Published:2010-03-23

摘要/Abstract

摘要： 本文采用光助溶胶—凝胶法制备了掺铝氧化锌(AZO)透明导电薄膜.研究了紫外光照射对薄膜导电性和透光性质的影响.结果表明:光照使薄膜的导电性显著提高,且光照后薄膜方阻的降低幅度随薄膜晶粒尺寸的减小而逐渐增加;而随着紫外光照射时间延长,薄膜的紫外吸收边蓝移,近红外区透光率降低.以上实验现象可能与表面吸附氧解吸引起的载流子浓度增加、迁移率升高以及分层退火处理形成的薄膜结构有关.

关键词: 掺铝氧化锌薄膜, 紫外光照射, 溶胶-凝胶

Abstract: Transparent conducting aluminum-doped zinc oxide(AZO) thin films were prepared by the UV light-assisted sol-gel method in this paper.The effects of UV light irradiation on conductive and transmittance properties of the AZO films were further studied.It is demonstrated that the conductivity of the AZO films is increased markedly by UV light irradiation,and the ratio of sheet resistance before and after irradiation increases with decreasing the microcrystal size in the film.Further more,the UV absorption edge shifts towards shorter wavelength and the NIR transmission decreases with prolonging the UV irradiation.These experimental phenomena are attributed to the surface oxygen desorption which lead to the increase in the carrier concentration and in mobility of carriers and the layer-annealing structure of the AZO film.

Key words: AZO thin film, UV irradiation, sol-gel

中图分类号:

张天宝, 李金培. 紫外光照射对掺铝氧化锌薄膜导电和透光性质的影响[J]. 影像科学与光化学, 2010, 28(2): 95-103.

ZHANG Tian-bao, LI Jin-pei. Effects of UV Light Irradiation on Conductive and Transmittance Properties of AZO Films[J]. Imaging Science and Photochemistry, 2010, 28(2): 95-103.

参考文献

[1] Zhou Y,Kelly P J,Postill A,et al.The characteristics of aluminium-doped zinc oxide films prepared by pulsed magnetron sputtering from powder targets[J].Thin Solid Films,2004,447-448:33-39.
[2] Kim H,Pique A,Horwitz J S,et al.Effect of aluminum doping on zinc oxide thin films grown by pulsed laser deposition for organic light-emitting devices[J].Thin Solid Films,2000,377-378:798-802.
[3] Musat V,Teixeira B,Fortunato E,et al.Al-doped ZnO thin films by sol-gel method[J].Surface and Coatings Technology,2004,180-181:659-662.
[4] Lin K M,Tsai P.Growth mechanism and characterization of ZnO:Al multi-layered thin films by sol-gel technique[J].Thin Solid Films,2007,515:8601-8604.
[5] Radhouane B H T.Structural and electrical properties of aluminum-doped zinc oxide films prepared by sol-gel process[J].Journal of the European Ceramic Societ,2005,25:3301-3306.
[6] Mridha S,Basak D.Effect of thickness on the structural,electrical and optical properties of ZnO films[J].Materials Research Bulletin,2007,42:875-882.
[7] Barnes T M,Leaf J,Fry C,et al.Room temperature chemical vapor deposition of c-axis ZnO[J].Journal of Crystal Growth,2005,274:412-417.
[8] Mohammad M T,Hashim A A,Al-Maamory M H.Highly conductive and transparent ZnO thin films Prepared by spray pyrolysis technique[J].Materials Chemistry and Physics,2006,99:382-387.
[9] Kuo S Y,Chen W C,Lai F I,et al.Effects of doping concentration and annealing temperature on properties of highly-oriented Al-doped ZnO films[J].Journal of Crystal Growth,2006,287:78-84.
[10] Zhou H M,Yi D Q,Yu Z M,et al.Preparation of aluminum doped zinc oxide films and the study of their microstructure,electrical and optical properties[J].Thin Solid Films,2007,515:6909-6914.
[11] 周宏明,易丹青,余志明,等.溶胶-凝胶法制备的ZnO:Al薄膜的微观结构及光学、电学性能[J].金属学报,2006,42(5):505-510.Zhou H M,Yi D Q,Yu Z M,et al.Microstructure,optical and electrical properties of ZnO:Al film prepared by sol-gel method[J].Acta Metalurgica Sinica,2006,42(5):505-510.
[12] 王炜,王波涛,董晓刚,等.溶胶-凝胶法制备ZnO:Al薄膜及其制备工艺条件研究[J].感光科学与光化学,2007,25(1):63-68.Wang W,Wang B T,Dong X G,et al.Preparation of the ZnO:Al thin films by sol-gel on their preparation technnics conditions[J].Photographic Science and Photochemistry,2007,25(1):63-68.
[13] Seung Y M,Koeng S L.Improvement of electrical andoptical properties of ZnO thin films prepared by MOCVD using UV light irradiation and in situ H₂ post-treatment[J].Solar Energy Materials & Solar Cells,2005,86:105-112.
[14] Bouderbala M,Hamzaoui S,Adnane M,et al.Annealing effect on properties of transparent and conducting ZnO thin films[J].Thin Solid Films,2009,517:1572-1576.
[15] 周公度,段连运.结构化学基础[M].第3版.北京大学出版社,2004.14-15.Zhou G D,Duan L Y.Basics of Structure Chemistry[M].3rd ed.Peking University Press,2004.14-15.
[16] 李琳,季振国,张亚红,等.氧化锌薄膜紫外光电导机理研究[J].半导体光电,2006,27(1):52-54.Li L,Ji Z G,Zhang Y H,et al.UV photoconductive mechanism of ZnO thin films[J].Semiconductor Optoelectronics,2006,27(1):52-54.

紫外光照射对掺铝氧化锌薄膜导电和透光性质的影响

Effects of UV Light Irradiation on Conductive and Transmittance Properties of AZO Films

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