Effects of UV Light Irradiation on Conductive and Transmittance Properties of AZO Films

doi:10.7517/j.issn.1674-0475.2010.02.95

Abstract

Abstract: Transparent conducting aluminum-doped zinc oxide(AZO) thin films were prepared by the UV light-assisted sol-gel method in this paper.The effects of UV light irradiation on conductive and transmittance properties of the AZO films were further studied.It is demonstrated that the conductivity of the AZO films is increased markedly by UV light irradiation,and the ratio of sheet resistance before and after irradiation increases with decreasing the microcrystal size in the film.Further more,the UV absorption edge shifts towards shorter wavelength and the NIR transmission decreases with prolonging the UV irradiation.These experimental phenomena are attributed to the surface oxygen desorption which lead to the increase in the carrier concentration and in mobility of carriers and the layer-annealing structure of the AZO film.

Key words: AZO thin film, UV irradiation, sol-gel

CLC Number:

ZHANG Tian-bao, LI Jin-pei. Effects of UV Light Irradiation on Conductive and Transmittance Properties of AZO Films[J]. Imaging Science and Photochemistry, 2010, 28(2): 95-103.

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