影像科学与光化学 ›› 1994, Vol. 12 ›› Issue (1): 58-61.DOI: 10.7517/j.issn.1674-0475.1994.01.58

• 研究快汛 • 上一篇    下一篇

发光多孔硅表面的STM研究

李学萍, 林瑞峰, 张振宗, 王维波, 刘尧, 肖绪瑞   

  1. 中国科学院感光化学研究所, 光电化学研究中心, 北京 100101
  • 收稿日期:1993-07-05 修回日期:1993-09-28 出版日期:1994-02-20 发布日期:1994-02-20
  • 通讯作者: 李学萍

STM STUDY ON PHOTOLUMINESCENT POROUS SILICON SURRACE

LI XUE-PING, LIN RUI-FENG, ZHANG ZHEN-ZONG, WANG WEI-BUO, LIU YAO, XIAO XU-RUI   

  1. THe Center of Photo electrochemistry, Institute of Photographic Chemistry, Academia Sinia, Beijing 100101, P. R. China
  • Received:1993-07-05 Revised:1993-09-28 Online:1994-02-20 Published:1994-02-20

摘要: 自从Canham首次报道了室温下多孔硅的光致发光现象以来[1],多孔硅已成为半导体光电化学及材料领域内最为热门的研究课题[2].

关键词: 扫描隧道显微镜, 多孔硅, 微结构

Abstract: The microstructure and morphology of photoluminescent porous silicon have beenstudied by using scanning tunneling microscope(STM).The changes of the sponge-likeporous structure observed on chemically etched silicon surface are quantitatively indicatedby the changes of the roughness parameters Ra,Rq,and Ry.The porous silicon formed bysimple chemcial etching,like the porous silicon produced anodically, can also emit visible luminescence at room temperature;and their emitting properties are closely related to theformation conditions.The results provide microstructure information for supporting the quantum coulinement effect as the luminescence mechanism.

Key words: scanning tunneling microscope, porous silicon, microstructure