Studies on the Acid-Generation Properties of a New Phthalocyanine Derivative as Photoetching Recording Materials

doi:10.7517/j.issn.1674-0475.2007.02.142

Abstract

Abstract: A New Phthalocyanine derivative,the p-toluenesulfonylphthalocyanine was synthesized from metal-free phthalocyanine.The photolysis properties of the compound exposed with UV light was investigated.It was found that the p-toluenesulfonylphthalocyanine can generate acid after exposure.With good photocatalysis property,this photoacid-generator is applicable to chemically amplified photoresist.

Key words: chemical amplification, photoacid generator, photo-catalysis, phthalocyanine

CLC Number:

TQ57

HUANG Lei, BIN Yue-jing, HUANG Xin, ZHANG Fu-shi. Studies on the Acid-Generation Properties of a New Phthalocyanine Derivative as Photoetching Recording Materials[J]. Imaging Science and Photochemistry, 2007, 25(2): 142-146.

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